The new metrology lab at PSI

We report on our new X-ray Optics Metrology Laboratory, which is specifically designed to meet the stringent requirements for nowadays X-ray optics. Recognizing the critical role of precision metrology in advancing high-performance X-ray optics, our laboratory integrates a suite of complementary instruments within an environment that ensures exceptional stability and cleanliness. Our metrology suite comprises a visible light microscope, a white light interferometer, a Fizeau interferometer, and a long trace profiler (LTP). Together, these instruments enable comprehensive characterization of X-ray optics, addressing critical parameters such as surface roughness, figure accuracy, and slope error. The key part of the new laboratory consists of two measurement cabins for the LTP and Fizeau. These are placed in a temperature-controlled environment (target < 0.01K in 24 h), on a vibration-damped floor (< VC-E) and in a cleanroom environment that surpasses the ISO-7 standard.