Development of monolithic deformable mirror for adaptive x-ray microscopy

A lithium niobate-based deformable mirror has been developed to achieve shape accuracy at the sub-nanometer level, surpassing current ultra-precision machining capabilities. X-ray microscopes that utilize advanced Kirkpatrick-Baez mirrors allow for high throughput and real-time observation at the nanoscale. However, further improvements in resolution necessitate in-situ shape correction. The single-crystal, single-domain piezoelectric properties of lithium niobate prevent drift, and its surface can be polished with ultra-high precision. Our developed mirror demonstrates a deformation accuracy of 0.5 nanometers and stability of 0.1 nanometers.