Multiframe blind deconvolution method using an in-plane rotating sample

Mirror-based X-ray microscopes have the problem that wavefront aberrations caused by mirror fabrication and alignment errors degrade the spatial resolution. To overcome the problem, we proposed a new blind deconvolution method using an in-plane rotating sample that can identify and remove the blur to improve the resolution. Demonstration experiments were carried out at SPring-8 BL29XUL using an X-ray microscope equipped with an advanced Kirkpatrick-Baez mirror. The intensity image obtained with an X-ray camera was blurred due to contamination of the used mirrors. After deconvolution, a clear image was obtained. The blur caused by the mirrors was perfectly identified and removed. The resolution of the reconstructed image was estimated to be 34 nm, which is close to the expected diffraction limit.