Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators

We demonstrate high-performance thin film lithium tantalate (TFLT) modulators with high optical transmission, large extinction ratio, low V π L , stable V π from 1 Hz to 1 MHz, and > 67 GHz bandwidth using a standard copper damascene process.

Authors

Johann Riemensberger
Tobias J. Kippenberg (ORCID: https://orcid.org/0000-0002-3408-886X)
Ming-Tzer Lin (ORCID: https://orcid.org/0000-0002-1685-8891)
Zihan Li (ORCID: https://orcid.org/0000-0002-6748-0665)

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_at.2025.pd103_6
Primary Topic: Photonic and Optical Devices
Type: article
Field-Weighted Citation Impact: 0.00

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article

Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators

Johann Riemensberger, Tobias J. Kippenberg, Ming-Tzer Lin, Zihan Li

Jan 1, 2025

Photonic and Optical Devices

article

Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators

Johann Riemensberger, Tobias J. Kippenberg, Ming-Tzer Lin, Zihan Li

January 1, 2025article en

Abstract

Openalex Percentile: Top 75%

Photonic and Optical Devices

DOI Source OpenAlex

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Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators — Johann Riemensberger, Tobias J. Kippenberg, et al. · (2025) | TGRS Research Map | TGRS