Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source
We report the development and use of a long-term stable tabletop coherent soft X-ray source for coherent diffraction measurements at 6.7 nm wavelength. This light source can enable widespread applications in scatterometry and imaging.
Authors
- M. Hemmer (ORCID: https://orcid.org/0000-0002-8614-8203)
- Nicholas W. Jenkins (ORCID: https://orcid.org/0000-0001-5725-0658)
- Henry C. Kapteyn (ORCID: https://orcid.org/0000-0001-8386-6317)
- G. Seifert (ORCID: https://orcid.org/0000-0001-9506-2316)
- G. Golba (ORCID: https://orcid.org/0000-0003-1796-524X)
- David R. Carlson (ORCID: https://orcid.org/0000-0002-0067-2400)
- Drew Morrill (ORCID: https://orcid.org/0000-0002-5237-5942)
- W. Hettel (ORCID: https://orcid.org/0009-0004-9810-4453)
- J.H. Thurston (ORCID: https://orcid.org/0000-0001-7819-0930)
- Russell D. Larsen (ORCID: https://orcid.org/0009-0008-6699-3339)
- M. M. Murnane
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.pd101_6
- Primary Topic
- Crystallography and Radiation Phenomena
- Type
- article
- Field-Weighted Citation Impact
- 0.00