Multi-Wavelength Integrated Interferometer for Nanoscale Displacement Sensing at Millimetre Distances
We present a multi-wavelength integrated interferometer for nanoscale displacement sensing of a mirror positioned several millimetres above the chip. The chip-to-mirror coupling is realized using waveguide holograms. The sensitivity measures 0.7%/nm at 633 nm.
Authors
- David De Vocht (ORCID: https://orcid.org/0000-0003-1914-9991)
- I.D. Setija (ORCID: https://orcid.org/0009-0002-0714-9011)
- E.A.J.M. Bente (ORCID: https://orcid.org/0000-0001-5100-662X)
- Yuqing Jiao (ORCID: https://orcid.org/0000-0003-2757-8948)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_at.2025.pd103_5
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00