High Speed Surface Acoustic Wave Imaging with Spectral Interferometry
We measure 1 gigahertz surface vibrations with spectral interferometry on a 76 kilohertz linescan camera. The vibrometer has a noise floor of 120 fm/sqrt(Hz) and images a 110 x 210 micron device in 10 minutes.
Authors
- Junhua Ji (ORCID: https://orcid.org/0000-0002-1800-9324)
- Bernadeta Srijanto (ORCID: https://orcid.org/0000-0002-1188-1267)
- Linbo Shao (ORCID: https://orcid.org/0000-0002-0615-7848)
- Ivan I. Kravchenko (ORCID: https://orcid.org/0000-0003-4999-5822)
- Guannan Shi (ORCID: https://orcid.org/0000-0001-8751-5098)
- Yizheng Zhu (ORCID: https://orcid.org/0000-0001-8099-0371)
- Joseph G. Thomas (ORCID: https://orcid.org/0000-0002-3682-5931)
- Yu Yao (ORCID: https://orcid.org/0000-0003-4891-7195)
- Zichen Xi
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.ss118_6
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00