RF-Sputtered Barium Titanate Thin Films for Compact and Ultrahigh-Speed Electro-Optical Modulators
Our work demonstrates high-quality BaTiO 3 thin films grown via cost-effective RF-sputtering, achieving exceptional crystallinity (FWHM ~0.03°), atomically smooth surfaces (RMS ~0.23 nm), and a very high (for RF sputtering) electro-optic coefficient, r 51 = 550 pm/V.
Authors
- Dean P. Brown
- Sarvagya Dwivedi (ORCID: https://orcid.org/0000-0003-1184-3225)
- Arnob Ghosh (ORCID: https://orcid.org/0000-0003-0793-7536)
- Shrivatch Sankar (ORCID: https://orcid.org/0000-0001-7260-3693)
- Md Saiful Islam Sumon
- Shamsul Arafin (ORCID: https://orcid.org/0000-0003-4689-2625)
- Fengyuan Yang (ORCID: https://orcid.org/0000-0001-6921-1533)
- Imad I. Faruque (ORCID: https://orcid.org/0000-0003-0916-2332)
- Vincent Stenger (ORCID: https://orcid.org/0000-0003-0492-9928)
- David A. Carpenter
- Benjamin Griffin
- Robert L. Nelson
- Katelyn Lazareno
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cleo_si.2025.ss102_4
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00