MHz-repetition rate femtosecond laser assisted selective etching of microchannels in lithium tantalate

Femtosecond laser assisted selective etching of up to 2.5mm long microchannels in LiTaO 3 was investigated quantitatively concerning etching progress on time and selectivity. Influence of fs laser repetition rate and writing speed were studied.

Authors

Sergiy Suntsov (ORCID: https://orcid.org/0000-0001-5203-7161)
Kore Hasse (ORCID: https://orcid.org/0000-0003-0657-5027)
Daniel Nwatu (ORCID: https://orcid.org/0000-0002-6638-5340)
Detlef Kip (ORCID: https://orcid.org/0000-0001-7923-0113)
Stella Müller (ORCID: https://orcid.org/0000-0003-3979-6774)

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/cleo_si.2025.ss107_3
Primary Topic: Innovative Microfluidic and Catalytic Techniques Innovation
Type: article
Field-Weighted Citation Impact: 0.00

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article

MHz-repetition rate femtosecond laser assisted selective etching of microchannels in lithium tantalate

Sergiy Suntsov, Kore Hasse, Daniel Nwatu, Detlef Kip et al.

Jan 1, 2025

Innovative Microfluidic and Catalytic Techniques Innovation

article

MHz-repetition rate femtosecond laser assisted selective etching of microchannels in lithium tantalate

Sergiy Suntsov, Kore Hasse, Daniel Nwatu, Detlef Kip, Stella Müller

January 1, 2025article en

Abstract

Femtosecond laser assisted selective etching of up to 2.5mm long microchannels in LiTaO 3 was investigated quantitatively concerning etching progress on time and selectivity. Influence of fs laser repetition rate and writing speed were studied.

Openalex Percentile: Top 76%

Innovative Microfluidic and Catalytic Techniques Innovation

DOI Source OpenAlex

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MHz-repetition rate femtosecond laser assisted selective etching of microchannels in lithium tantalate — Sergiy Suntsov, Kore Hasse, et al. · (2025) | TGRS Research Map | TGRS