Enhancing Triboelectric Nanogenerator Performance via Ultraviolet Nanosecond Laser-Engineered Microstructured Intermediate Layer

The increasing demand for powering wireless sensors and wearable electronics has intensified the need for efficient and sustainable powering solutions. In this context, triboelectric nanogenerators (TENGs) have emerged as a promising technology for sustainable power supply, converting ambient mechanical energy into electricity. To improve energy harvesting efficiency and durability, it is crucial to continuously enhance output performance and extend cycle life. Introducing an intermediate layer has proven effective in boosting TENG performance, however, most existing designs remain planar structures and do not fully maximize the charge storage potential of the intermediate layer. In this work, we introduced a novel approach to improving TENG performance through ultraviolet nanosecond laser-engineered intermediate layers. This method significantly enhanced TENG output, increasing the short-circuit current by 3.8 times (from 2.2 to 8.4 μA) and the open-circuit voltage by 2.3 times (from 160 to 370 V) compared to TENGs with flat intermediate layers. The improvement is attributed to an increased effective bonding area, which enhances charge storage capacity. In addition, the generated graphite oxide layer during processing and the laser heat affected layer on the underside of the polyimide intermediate layer accelerates charge accumulation and the charging speed increased by 3 times. We also systematically investigated the influence of laser power, speed, processing patterns, and intermediate layer thickness on TENG performance. The results show that the appropriate matching of laser parameters and the dielectric layer thickness can maximize TENG performance.