Design and simulation automation of large-size SiN ring resonator consisting of foundry process layers

We propose a design and simulation automation of large-size SiN ring resonator consisting of foundry process layers that can give the designer flexibility to perform design variations and faster simulations conveniences where the designer can incorporate the foundry process layers in the simulation flow to predict the expected results. To perform this work, we used KLayout for GDS, ANSYS Lumerical FDE, FDTD and INTERCONNECT tools and performed results verification between the simulation and the measured data from the AIM Photonics fabricated two large diameter ring resonators of diameter 200μm and 400μm. Both the 200μm and 400μm diameter ring resonators have good trends between the simulated data and the actual measured data with a free spectral range (FSR) of 2nm for 200μm diameter ring resonator and FSR of 1nm for the 400μm diameter ring resonator. The results are presented with a wavelength range between 1520nm and 1570nm