Thermal damage characterization based on the laser-matter interaction simulation

This work demonstrates the thermal damage characterization methods for checking the thermal safety from the external short pulse laser injection. Two processes have been developed for different temperature range. Ion implantation (detection range 800°C -1000°C) used by implanting poly silicon with boron ions, the concentration of boron atoms for some depth can be tracked using time of flight secondary ion mass spectroscopy (TOF-SIMS) as a result of laser damage. The metal silicide (detection range: 500°C -700°C) used for the phase transition detection by X-Ray diffraction (XRD). The thermal simulation is based on the thermal damage experiments results for modelling a broader spectrum of stacked materials.