Zero-standby-power microcantilever switch for hydrogen sensing

An event-driven bistable microcantilever switch with Palladium (Pd) as the active sensing layer has been developed for hydrogen detection. The microcantilever functions as a switch based on out-of-plane displacement resulting from strain generated in Pd thin films during the hydrogen adsorption and desorption process. Cantilevers with varying separations between the top and bottom contacts showed different durations of making contact and using such cantilevers connected in parallel showed a measurable voltage change across the configuration with each switching event. The time required to establish the subsequent contact correlates with hydrogen concentration, making this bistable switch suitable for quantifying hydrogen levels. This innovative zero-standby-power approach to hydrogen sensing holds substantial promise for meeting the sensor demands of the hydrogen-based green economy.

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Publication Details

Published
2025-09-15
DOI
https://doi.org/10.1117/12.3064581
Primary Topic
Mechanical and Optical Resonators
Type
article
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Zero-standby-power microcantilever switch for hydrogen sensing

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Mechanical and Optical Resonators
article

Zero-standby-power microcantilever switch for hydrogen sensing

Sai Rahul Sitaram, Eric Herrmann, Zhixiang Huang, Xi Wang, S M Jahadun Nobi
article en

Abstract

An event-driven bistable microcantilever switch with Palladium (Pd) as the active sensing layer has been developed for hydrogen detection. The microcantilever functions as a switch based on out-of-plane displacement resulting from strain generated in Pd thin films during the hydrogen adsorption and desorption process. Cantilevers with varying separations between the top and bottom contacts showed different durations of making contact and using such cantilevers connected in parallel showed a measurable voltage change across the configuration with each switching event. The time required to establish the subsequent contact correlates with hydrogen concentration, making this bistable switch suitable for quantifying hydrogen levels. This innovative zero-standby-power approach to hydrogen sensing holds substantial promise for meeting the sensor demands of the hydrogen-based green economy.

University of Delaware (US)
Openalex Percentile: Top 81%
Mechanical and Optical Resonators
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