BEOL-compatible monolithic integration of property-tunable complex oxide single crystals on Si for advancing the more-than-Moore paradigm
Complex oxide single-crystal thin films offer diverse functionalities essential for advancing the More-than-Moore paradigm in semiconductor technology. However, their direct integration with Si-based complementary metal-oxide-semiconductor (CMOS) circuits remains challenging due to thermal budget constraints and the difficulty of applying oxide-engineering techniques—such as strain, interface, and domain engineering— for tailoring properties on silicon. In this work, we demonstrate room-temperature monolithic integration of complex oxides onto silicon by combining epitaxial lift-off and surface-activated metal bonding, effectively overcoming thermal limitations. This method allows the application of oxide-engineering methodologies on silicon substrates, as demonstrated using ferromagnetic SrRuO3, ferroelectric Pb(Mg,Nb)O3-Pb(Zr,Ti)O3, and induced-ferroelectric SrTiO3. Moreover, we highlight its practical potential through the fabrication of flexible ferroelectric heterostructures and electrically-controllable energy storage devices with a one-transistor, one-capacitor structure. This integration strategy facilitates the incorporation of emergent oxide functionalities into CMOS via back-end-of-line (BEOL) processes, bridging complex oxide science with silicon technology for advancing the More-than-Moore paradigm.
Authors
- June Hyuk Lee (ORCID: https://orcid.org/0000-0002-7142-966X)
- Haneul Choi (ORCID: https://orcid.org/0000-0003-2519-6348)
- Keun Young Huh
- Jun Woo Choi (ORCID: https://orcid.org/0000-0002-0418-8245)
- Ruiguang Ning
- Sunghoon Hur (ORCID: https://orcid.org/0000-0001-6985-5937)
- Chong-Yun Kang
- Sung Ok Won (ORCID: https://orcid.org/0000-0001-6606-3061)
- Tae Heon Kim (ORCID: https://orcid.org/0000-0003-4835-0707)
- So-Min Song
- Seung‐Hyub Baek (ORCID: https://orcid.org/0000-0002-3187-6596)
- Hyung-Jin Choi
- Dong-Hun Han (ORCID: https://orcid.org/0009-0003-2510-1764)
- Sang Won An
- Jun Young Lee (ORCID: https://orcid.org/0009-0004-2533-6405)
- Bong Ho Kim
- Jin Dong Song
- Sung Ok Won
- Jin Soo Park
- Min-Seok Kim
- Ho-Yong Lee
- Soo Young Jung
- Haneul Choi
- Donghee Park
- Sang Mo Yang
- Byung Chul Lee
- Hye Jung Chang
Institutions
- Seoul National University (KR)
- Sogang University (KR)
- Korea Atomic Energy Research Institute (KR)
- Korea Advanced Institute of Science and Technology (KR)
- Yonsei University (KR)
- Korea University (KR)
- Advanced Institute of Convergence Technology (KR)
- Korean Association Of Science and Technology Studies (KR)
- Korea Research Institute of Chemical Technology (KR)
- Sun Moon University (KR)
- Korea Institute of Science and Technology (KR)
- Korea Institute of Science & Technology Information (KR)
- Korea University of Science and Technology (KR)
Publication Details
- Journal
- Materials Today
- Published
- 2026-11-07
- DOI
- https://doi.org/10.1016/j.mattod.2026.103567
- Primary Topic
- Electronic and Structural Properties of Oxides
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Korea Institute of Science and Technology
- Korea Atomic Energy Research Institute
- National Research Foundation of Korea
- Daegu Gyeongbuk Institute of Science and Technology
- Ministry of Science and ICT, South Korea
- Samsung Science and Technology Foundation
- Samsung