A Higher-Yielding Route for the Synthesis of Molecular Precursors to Thin Films of Gold by Atomic Layer Deposition

A synthetically straightforward and high-yielding route to the series of complexes [AuMe₂(dtc)] (dtc = dithiocarbamate) has been developed using dialkyl-, cyclic-dialkyl-, and diaryldithiocarbamate ligands. These compounds were screened by thermogravimetric analysis (TGA) to determine their viability as molecular precursors to thin films of elemental gold by atomic layer deposition. TGA revealed that the volatility of the precursor decreased as the mass of the precursor increased, making the heavier molecules less suitable precursors. However, [AuMe₂(Me₂dtc)], the lightest member of the series, is potentially a better precursor than [AuMe₂(Et₂dtc)] due to its higher volatility and slightly lower residual mass.