Low-loss polymeric waveguides for co-packaged optics on glass substrates

Abstract In this study, we demonstrate photonic resonators by integrating polymeric waveguides using cost-effective ultraviolet (UV) contact lithography on glass substrates. Low-loss waveguides are realized while the quality ( Q ) factor of waveguide resonators can be up to 10 5 . Employing the glass substrate effectively reduces optical power leakage and lowers the cost of a thick buried SiO 2 layer compared to the conventional silicon substrate. Uniform, high extinction, single-mode resonances are identified within a broad spectrum (1540–1560 nm) in the telecommunication band. In addition, a hybrid waveguide platform integrating both polymers and dielectric Si 3 N 4 is introduced on the glass substrates, offering the potential for enhanced optical confinement and a smaller device footprint. A comparable Q factor of approximately 10 5 is again achieved using etch-free processes and µ m-scale UV contact lithography. This demonstration highlights the potential for a simple, fast, low-thermal budget configuration of high-quality glass-based photonics, which is advantageous for future co-packaged photonics on glass interposers.