Deep-UV metalenses and high-Q metasurfaces

Deep ultraviolet (DUV) light plays a critical role in applications such as nanolithography, biosensing, and spectroscopy. Metasurfaces, composed of precisely engineered nanoresonators, offer unique capabilities for manipulating light at the nanoscale, enabling advancements in DUV technologies. We present high-Q metasurfaces and metalenses based on low-loss dielectric materials, including HfO2 and AlN. These devices leverage well-tailored resonance modes and innovative designs to achieve functionalities such as spectrometer-free biosensing, high-resolution imaging, and ultrafast laser fabrication. This work establishes a versatile platform for advancing DUV nanophotonics, with applications spanning sensing, quantum optics, and nonlinear optics. (Nano Letters, 2025, DOI: 10.1021/acs.nanolett.4c05552)