Single-shot cm-scale nanofabrication of plasmonic metasurfaces for trace detection of chemical compounds
Here we show how to utilize the well-known laser interference lithography to assemble wafer-scale metasurfaces with periodicities of few hundreds of nanometers within a single-shot. We achieve highly ordered 1- and 2-D metasurfaces containing billions of nanoscale features which can be readily fabricated over large areas (>cm<sup>2</sup>) ideal for trace detection of chemicals via surface-enhanced Raman spectroscopy.
Authors
- John C. de Mello (ORCID: https://orcid.org/0000-0002-1704-2392)
- Enkui Lian (ORCID: https://orcid.org/0009-0007-6449-2867)
- Eleni Perivolari (ORCID: https://orcid.org/0000-0003-3051-7839)
Institutions
- Norwegian University of Science and Technology (NO)
Publication Details
- Published
- 2025-09-16
- DOI
- https://doi.org/10.1117/12.3065729
- Primary Topic
- Plasmonic and Surface Plasmon Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00