Optothermal bubble etching: sustainable and on-demand nanomanufacturing
Bubble etching introduces a sustainable, on-demand nanomanufacturing solution that addresses critical challenges in the field, such as the high cost, limited design flexibility, and environmental impact of conventional mask-based lithography. This maskless, laser-driven technique utilizes laser-generated bubbles as localized reactors for precise, high-resolution patterning. By integrating optothermal manipulation with controlled chemical etching, bubble etching enables customizable fabrication while significantly reducing chemical waste and energy consumption. Advancing green nanomanufacturing, this method provides a scalable and environmentally friendly approach for producing next-generation materials and devices.
Authors
- Andrew Kuo
- Anand Swain
- Yuebing Zheng (ORCID: https://orcid.org/0000-0002-9168-9477)
- Ankur Jain (ORCID: https://orcid.org/0000-0001-5573-0674)
- Moein Nouri
- Ke Nguyen
- Aadi Vasa
- Pradyota Phaneesh
Institutions
- The University of Texas at Austin (US)
Publication Details
- Published
- 2025-09-16
- DOI
- https://doi.org/10.1117/12.3061570
- Primary Topic
- Electrohydrodynamics and Fluid Dynamics
- Type
- article
- Field-Weighted Citation Impact
- 0.00