Ion beam polishing on the surface performance of fused silica optical materials

For high-precision optical systems to operate effectively, an exceptionally smooth surface is necessary. In order to achieve ultra-smooth surfaces through the process of ion beam polishing, the surface morphology that is produced by ion beam figuring (IBF) can range from smooth to rough, mostly dependent on the conditions under which the processing is carried out. Inadequate ion beam polishing techniques may result in heightened surface roughness, whereas the selection of a suitable method aids in reducing roughness and attaining an ultra-smooth finish. Research findings demonstrate that high-precision ion beam polishing technology can enhance the surface roughness of fused silica using ion beam tilting polishing at incident angles ranging from 0° to 45°. Polishing at smaller angles (0° to 30°) is more effective in enhancing surface smoothness and achieving an ultra-smooth finish. However, nanoscale ripple patterns appear at larger incident angles, significantly increasing roughness, which hinders the formation of ultra-smooth surfaces.