Photoacoustic spectroscopy detection based on complementary interdigital cantilever enhanced Fabry-Perot acoustic sensor

Photoacoustic spectroscopy (PAS) has been widely used for detecting trace gases, but enhancing sound pressure detection capability of the acoustic sensor is crucial for improving gas detection sensitivity of the PAS system. In this paper, a complementary interdigital (CID) cantilever Fabry-Perot (F-P) fiber optic acoustic sensor (FOAS) was developed. Experimental results demonstrated that the CID cantilever operated at its resonance frequency of 1010 Hz exhibited a high sensitivity of 923.7 nm/Pa, and exhibited a signal-to-noise ratio of 72.2 dB and a minimum detectable pressure of 16.4 μPa/Hz <sup>1/2</sup> at 1 kHz. In the concentration range of 20 ppm to 100 ppm, the sensitivity of PAS to C₂H₂ gas was 3.02 pm/ppm and the detection limits of C₂H₂ in N₂ background was 30.17 ppb. This design employs highly sensitive cantilevers with tunable resonance, enhancing the gas detection sensitivity of the PAS system by leveraging resonant frequency matching and signal amplification.

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Publication Details

Journal
Photoacoustics
Published
2025-09-09
DOI
https://doi.org/10.1016/j.pacs.2025.100768
Primary Topic
Advanced Chemical Sensor Technologies
Type
article
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article

Photoacoustic spectroscopy detection based on complementary interdigital cantilever enhanced Fabry-Perot acoustic sensor

Zhiqi Gao, Da Jun Hou, Yinji Chen, Qiaoyun Wang et al.
Photoacoustics
Advanced Chemical Sensor Technologies
article

Photoacoustic spectroscopy detection based on complementary interdigital cantilever enhanced Fabry-Perot acoustic sensor

Zhiqi Gao, Da Jun Hou, Yinji Chen, Qiaoyun Wang, Zhigang Li, Tianyu Li, Qiang Liu, Chongyue Yan, Ziheng Zhu
article en

Abstract

Photoacoustic spectroscopy (PAS) has been widely used for detecting trace gases, but enhancing sound pressure detection capability of the acoustic sensor is crucial for improving gas detection sensitivity of the PAS system. In this paper, a complementary interdigital (CID) cantilever Fabry-Perot (F-P) fiber optic acoustic sensor (FOAS) was developed. Experimental results demonstrated that the CID cantilever operated at its resonance frequency of 1010 Hz exhibited a high sensitivity of 923.7 nm/Pa, and exhibited a signal-to-noise ratio of 72.2 dB and a minimum detectable pressure of 16.4 μPa/Hz <sup>1/2</sup> at 1 kHz. In the concentration range of 20 ppm to 100 ppm, the sensitivity of PAS to C₂H₂ gas was 3.02 pm/ppm and the detection limits of C₂H₂ in N₂ background was 30.17 ppb. This design employs highly sensitive cantilevers with tunable resonance, enhancing the gas detection sensitivity of the PAS system by leveraging resonant frequency matching and signal amplification.

PhotoacousticsVol. 46
Northeastern University (CN)
Openalex Percentile: Top 77%
Advanced Chemical Sensor Technologies
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Photoacoustic spectroscopy detection based on complementary interdigital cantilever enhanced Fabry-Perot acoustic sensor — Zhiqi Gao, Da Jun Hou, et al. · Photoacoustics (2025) | TGRS Research Map | TGRS