MOCVD Growth of GaN/InN/GaN Quantum Wells

The growth of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{GaN} / \text{InN} / \text{GaN}$</tex> quantum wells via MOCVD without flow-modulation or plasma-assistance is presented. A growth supersaturation model is employed which enables unification of all reaction conditions (temperature, pressure, flow rates, etc.) into a single parameter. Ultimately, state-of-the-art quantum wells with abrupt interfaces are produced.

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Publication Details

Published
2025-08-13
DOI
https://doi.org/10.1109/rapid64712.2025.11151366
Primary Topic
GaN-based semiconductor devices and materials
Type
article
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MOCVD Growth of GaN/InN/GaN Quantum Wells

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MOCVD Growth of GaN/InN/GaN Quantum Wells

Seiji Mita, Ronny Kirste, Masahiro Kamiyama, Monica Allen, Zlatko Sitar, Ramón Collazo, Jeffery Allen, Michael J. Carter, Md Fahel Bin Noor
article en

Abstract

The growth of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{GaN} / \text{InN} / \text{GaN}$</tex> quantum wells via MOCVD without flow-modulation or plasma-assistance is presented. A growth supersaturation model is employed which enables unification of all reaction conditions (temperature, pressure, flow rates, etc.) into a single parameter. Ultimately, state-of-the-art quantum wells with abrupt interfaces are produced.

United States Air Force Research Laboratory (US), North Carolina State University (US), Adroit Materials (United States) (US)
Openalex Percentile: Top 85%
GaN-based semiconductor devices and materials
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