Progress of computer simulation technologies for surface acoustic wave devices—review

Abstract This paper reviews the progress of simulation technologies used in the research and development of surface acoustic wave (SAW) devices and their relationship with the evolution of the available computer environment. Until the 1980s, only simple behavior models were applicable for their design because of limited computer power, and model parameters were mainly determined experimentally. Then, with the rapid progress of computer environments, more complex full-wave analyses became applicable. They were applied to the parameter determination for the behavior models first and then to the design of complex device structures. Moreover, a technique called the hierarchical cascading technique was proposed for accelerating the two-dimensional finite element method (FEM) calculation of SAW devices. The technique has been extended and is now applicable even to the full 3D FEM of the whole SAW device structure. A few results are shown to reveal what became possible and were found using this technique.