Generation of 194 nm Deep-UV pulses using a Cavity-Dumped 721 nm Pr:YLF laser with Tunable repetition rates

A compact 194 nm laser with a few-ns pulse from 5 to 15 kHz is developed by frequency mixing a red Pr-doped laser with a fourth-harmonic Nd-doped laser. The red laser was generated by electro-optic Q-switched cavity dumping, which has kW peak power and constant short pulse duration. The maximum average output power of 34.7 mW at 194 nm was realized at 7 kHz. The pulse duration was maintained at 5.1 ns, which is independent of the repetition rate. The maximum pulse energy of 5.7 μJ was obtained at 5 kHz, and the corresponding peak power was up to 1.12 kW.