Position-Selective Fabrication of TiO_2−x Semiconductive Microline by Nanosecond Pulse Laser Modification for Gas Sensing

This paper proposes the position-selective fabrication of semiconductive TiO 2−x microline by YVO 4 nanosecond pulse laser modification and demonstrates its gas sensing performance for NH 3 . We directly fabricated TiO 2−x microlines with a minimum line width of 10 μm on a TiO 2 substrate by focusing laser irradiation. The microline showed systematic response as increase in the electrical resistance to NH 3 gas at 40–80 ppm. A systematic fabrication of semiconductive oxide microlines with various line widths could design their gas sensitivity based on control of efficient self-heating by the applied current through the microline. Furthermore, using the advantages of the position-selective laser modification, we also fabricated a more complex zigzag patterned TiO 2−x microline and demonstrated the improved gas sensitivity.