Multimode tunable atomically thin vibrating-channel-transistor resonators with ultra-efficient electromechanical transduction

Transistors based on two-dimensional (2D) semiconductors have emerged as promising candidates for ultra-scaled computing devices. By suspending the 2D channels and inducing mechanical resonance modes in the 2D semiconducting membranes, they form 2D vibrating-channel-transistor (VCT) resonators with ultralow power consumption. Yet on-chip electronic detection and tuning of multimode resonances in these 2D VCT resonators have been challenging due to the ultrasmall vibration amplitudes and rich multimode dynamics at radio frequencies (RF). Here, we leverage the atomic-scale thickness, ultrahigh strain limit, as well as strain-engineering effects on band structure and carrier mobility of 2D molybdenum disulfide (MoS2) sheets, and experimentally demonstrate multimode 2D MoS2 VCT resonators. Using all-electronic signal transduction, we show single-, bi-, and tri-layer MoS2 VCT resonators with up to the 14th resonance mode, thanks to the ultra-efficient electromechanical transduction enabled by internal multiphysics coupling. Measured gate dependency of multimode resonances exhibits frequency tuning ranges of Δf/f0 up to 326%. These 2D VCT resonators provide a unique platform for engineering on-chip integrated and ultra-scaled RF signal transduction, sensing, and analog computing elements with multimode and hyperspectral capabilities.