Densification of CeO2 target and the properties of sputtered thin films

The densification process of CeO 2 sputtering target is studied, and high-performance transparent hydrophobic thin films are successfully prepared. A stable CeO 2 slurry with a solid content of 62 wt% and a viscosity of 943 mPa s is prepared by ball milling 16 h. The green compact is obtained by spray granulation, molding and cold isostatic pressing. Based on the MSC method, the densification activation energy of CeO 2 is calculated to be 790 kJ/mol, and the CeO 2 target with a relative density of 97.66 %, a bending strength of 107.2 MPa and a hardness of 680 HV is prepared at 1400 °C for 20 h CeO 2 thin films exhibiting 85.1 % transmittance and a 100° water contact angle were prepared by radio frequency magnetron sputtering at a sputtering pressure of 0.4 Pa. Consistent with the Wenzel model for hydrophobic surfaces (contact angle>90°), the hydrophobicity of the CeO 2 thin film increases with surface roughness. At 0.8 Pa deposition pressure, the film exhibits a surface roughness of 4.24 nm and a water contact angle of 110.1°.