Research on atomic force probe approaching surface method based on laser ranging

The traditional atomic force probe approximation surface method is difficult to achieve fast and automated operation, which affects the application of atomic force microscopy measurement technology in the field of large sample measurement. By introducing laser ranging technology, the distance between the laser ranging point and the optical image center and the distance between the laser ranging point and the probe tip are calibrated separately. After selecting the target measurement point, the computer calculates and controls the probe displacement, automatically approaching the surface to achieve the set atomic force state. After experimental verification, the new method saves about $33 \%$ of time compared to optical focusing positioning. This indicates that the method can achieve automated and fast operation during the process of atomic force probe approaching the surface, improving the measurement efficiency of atomic force microscopy technology.