Novel Estimation Method of Force Application Point for Cantilever‐Type MEMS Tactile Sensor

ABSTRACT In this paper, we propose a new evaluation method for the spatial distribution of sensitivity to force in a cantilever‐type MEMS tactile sensor developed in our laboratory. By combining the responses of two strain gauges attached to the cantilever with different coefficients, it is shown that the spatial distribution of sensitivity can be controlled, and the force application position and the magnitude of force can be predicted with high accuracy.