Metrology for Virtual Measuring Instruments Illustrated by Three Applications

In the course of digitalization, the importance of modeling and simulating real-world processes in a computer is rapidly increasing. Simulations are now in everyday use in many areas. For example, simulations are used to gain a better understanding of the real experiment, to plan new experiments, or to analyze existing experiments. Simulations are now also increasingly being used as an essential component of a real measurement, usually as part of an inverse problem. To ensure confidence in the results of such virtual measurements, traceability and methods for evaluating uncertainty are needed. In this paper, the challenges and benefits inherent to virtual metrology techniques are shown using three examples from different metrological fields: the virtual coordinate measuring machine, the tilted-wave interferometer, and the virtual flow meter.