Numerical Simulation of Temperature Distribution in CCD Detector Irradiated by Nanosecond Pulsed Laser

A finite element simulation was conducted to analyze the thermal damage caused by a 532nm nanosecond pulsed laser on a CCD detector. A three-dimensional model was developed to study the temperature field variations within the detector. The simulation was centered on the laser-induced temporal progression of thermal damage in the CCD. Results showed that higher laser fluence led to increased heat accumulation, resulting in the expansion of the thermal damage area. Different thermal damage patterns were observed in the light sensor region and the light-shielded region. In the light sensor region, the melting of the silicon substrate expanded more in the transverse direction compared to the longitudinal direction with increasing laser fluence, while damage in the light-shielded region extended from the edges towards the center as laser fluence increased. These distinct damage patterns were attributed to different energy deposition patterns and structural differences between the light sensor region and the light-shielded region.