Advanced Circuits and Systems for Navigation-Grade MEMS Accelerometers

Silicon oscillating accelerometers have the potential to achieve navigation-grade precision due to their frequency-modulation nature. As a result, they present a promising alternative to quartz accelerometers in smart unmanned platforms that require satellite-free navigation. This tutorial will begin with an introduction to the fundamental principles and specification requirements of MEMS resonant sensors. It will then delve into the noise modelling and agile design methodologies essential for optimizing performance. Advancements in low-noise, highefficiency readout circuits will also be explored. Finally, the impact of long-term drift errors caused by temperature fluctuations, process variations, and environmental changes will be discussed, along with advanced compensation techniques. By addressing key challenges and solutions, this tutorial aims to provide valuable insights for sensor and system designers working on high-precision MEMS accelerometers and navigation applications. This talk is sponsored by IEEE Circuits and Systems Society.