Laser annealing of transparent ZnO thin films: a route to improve electrical conductivity and oxygen sensing capabilities

Ultra-short-pulse laser radiation has been used to modulate the electrical conductivity of ZnO thin films deposited by spatial atomic layer deposition. Resistance time evolution exhibits high sensitivity to oxygen concentration in the environment.

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Publication Details

Journal
RSC Applied Interfaces
Published
2025-01-01
DOI
https://doi.org/10.1039/d5lf00076a
Citations
3
Primary Topic
ZnO doping and properties
Type
article
Field-Weighted Citation Impact
1.55

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article

Laser annealing of transparent ZnO thin films: a route to improve electrical conductivity and oxygen sensing capabilities

Elena Martínez, Germán F. de la Fuente, Fidel Toldrá‐Reig, David Muñoz‐Rojas et al.
3 citations
RSC Applied Interfaces
ZnO doping and properties
1.55
article

Laser annealing of transparent ZnO thin films: a route to improve electrical conductivity and oxygen sensing capabilities

Elena Martínez, Germán F. de la Fuente, Fidel Toldrá‐Reig, David Muñoz‐Rojas, L.A. Angurel, A. Frechilla, Francisco Balas, Javier Frechilla
article en
3 citations

Abstract

Ultra-short-pulse laser radiation has been used to modulate the electrical conductivity of ZnO thin films deposited by spatial atomic layer deposition. Resistance time evolution exhibits high sensitivity to oxygen concentration in the environment.

RSC Applied InterfacesVol. 2(6)
Institut polytechnique de Grenoble (FR), Centre National de la Recherche Scientifique (FR), Instituto de Nanociencia y Materiales de Aragón (ES), Université Grenoble Alpes (FR)
Universidad de Zaragoza, Gobierno de Aragón, Horizon 2020 Framework Programme, European Regional Development Fund, Agencia Estatal de Investigación
Openalex Percentile: Top 16%
ZnO doping and properties
1.55
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Laser annealing of transparent ZnO thin films: a route to improve electrical conductivity and oxygen sensing capabilities — Elena Martínez, Germán F. de la Fuente, et al. · RSC Applied Interfaces (2025) | TGRS Research Map | TGRS