0.08 ppm Scale Factor Nonlinearity in Whole-Angle Hemispherical Resonator Gyroscopes Enabled by Rapid Detection Signal Nonlinearity Suppression

Detection signal nonlinearity, induced by nonlinear capacitive variations in electrode gaps, fundamentally limits the performance of whole-angle (WA) mode hemispherical resonator gyroscopes (HRGs). This letter proposes a rapid identification method for this nonlinearity based on the relationship between the amplitude-gap ratio and resonator vibration energy. Experimental results across 100-500 °/s input rotation velocities confirms method accuracy and operational robustness. Post-compensation HRG achieves a bias instability (BI) of 0.006 °/h and a scale factor nonlinearity (SFN) of 0.08 ppm. The achieved SFN of 0.08 ppm represents the lowest reported value for WA mode HRGs to date.