A 2-D Resistive Sensor Array for Temperature Distribution Measurement in High-Temperature Environments

Obtaining high-density temperature distribution of key components is extremely important for the safety and efficiency of thermal engines operating under extreme thermal conditions. Although the 2-D resistive sensor array (RSA) is widely used for temperature distribution measurement, its application in high-temperature environments remains to be explored. While using high-temperature-resistant materials enables the 2-D RSA to operate under such conditions, wire resistance and crosstalk from parasitic parallel paths lead to significant measurement errors. In order to achieve temperature distribution measurements in high-temperature environments, we propose a 2-D RSA integrated with an accurate measurement method, designed for surface deployment on high-temperature components. A 4×4 and an 8×8 2-D RSA, with a thickness of less than 100 μm, were fabricated using screen printing, with RTDs and wires made of platinum that can withstand high temperatures. Measurement errors caused by wire resistance and crosstalk are mitigated by the compensated resistance matrix approach (CRMA). The calibration of RTDs derived temperature coefficient of resistance (TCR) and characteristic curves up to 1200°C. Furthermore, experimental validation of the 2-D RSA confirmed its high-temperature measurement capability. The results showed that the measurements matched those of the thermal imaging camera and thermocouples with a relative error of less than 2%. This 2-D resistive sensor array is capable of accurately measuring 2-D temperature distributions in high-temperature environments up to 1200°C.