Fabrication and Pore Characteristics of Metal Powder Filters with a Cross-Sealed Honeycomb Shape Using Material Extrusion Additive Manufacturing

The development of high-performance metal filters is essential for maintaining ultra-clean environments in semiconductor manufacturing. In this study, cross-sealed honeycomb filters were fabricated using STS316L powder via material extrusion additive manufacturing (MEAM) for semiconductor gas filtration. The effects of filter geometry (4 or 9 channels) and sintering temperature (850°C, 950°C, or 1,050°C) on performance were examined. First, 4-channel and 9-channel filters sintered at the same temperature (950°C) exhibited similar porosities of 50.08% and 50.57%, but the 9-channel filter showed a higher pressure-drop (0.26 bar) and better filtration-efficiency (3.55 LRV) than the 4-channel filter (0.19 bar and 3.25 LRV, respectively). Second, for filters with the same geometry (4-channel) increasing the sintering temperature reduced porosity from 64.52% to 40.33%, while the pressure-drop increased from 0.13 bar to 0.22 bar and filtration-efficiency improved from 2.53 LRV to 3.51 LRV. These findings demonstrate that filter geometry and sintering temperature are key factors governing the trade-off between air permeability, pressure-drop, and filtration efficiency. This work provides insights and data for optimizing MEAM-based high-performance metal powder filter design.