Design of closed-loop system for micromechanical resonators based on FPGA

In this paper, an FPGA-based closed-loop control architecture is proposed to address the key issues such as slow dynamic response and insufficient frequency tracking accuracy in the research of micromechanical resonator closed-loop control systems. The system adopts a preamplifier circuit to achieve weak resonance signal extraction and combines an improved digital phase-locked loop (DPLL) with digital automatic gain control (DAGC) to form a closed-loop control. The system innovatively combines analogue signal conditioning with digital signal processing, and real-time phase detection and amplitude adjustment are implemented in FPGA through hardware description language. The test results show that the frequency accuracy reaches 99.99% and the amplitude accuracy reaches 96.97%, which meets the design requirements and lays an important foundation for the practical application of micromechanical resonators.

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Publication Details

Published
2025-08-28
DOI
https://doi.org/10.1117/12.3077037
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
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article

Design of closed-loop system for micromechanical resonators based on FPGA

Fan‐Yan Wei, Bo Yang, Lyu Ming, Yue Quan et al.
Advanced MEMS and NEMS Technologies
article

Design of closed-loop system for micromechanical resonators based on FPGA

Fan‐Yan Wei, Bo Yang, Lyu Ming, Yue Quan, Zhikun Zha
article en

Abstract

In this paper, an FPGA-based closed-loop control architecture is proposed to address the key issues such as slow dynamic response and insufficient frequency tracking accuracy in the research of micromechanical resonator closed-loop control systems. The system adopts a preamplifier circuit to achieve weak resonance signal extraction and combines an improved digital phase-locked loop (DPLL) with digital automatic gain control (DAGC) to form a closed-loop control. The system innovatively combines analogue signal conditioning with digital signal processing, and real-time phase detection and amplitude adjustment are implemented in FPGA through hardware description language. The test results show that the frequency accuracy reaches 99.99% and the amplitude accuracy reaches 96.97%, which meets the design requirements and lays an important foundation for the practical application of micromechanical resonators.

Inner Mongolia University (CN), ITS (United Kingdom) (GB), Saft (France) (FR)
Affordable and clean energy
Openalex Percentile: Top 78%
Advanced MEMS and NEMS Technologies
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Design of closed-loop system for micromechanical resonators based on FPGA — Fan‐Yan Wei, Bo Yang, et al. · (2025) | TGRS Research Map | TGRS