Selective phase growth of van der Waals high- <i>κ</i> Sb <sub>2</sub> O <sub>3</sub> films
Oxygen-assisted PLD enables phase-selective growth of wafer-scale α-/β-Sb 2 O 3 films with high dielectric constants (>100). Pure α-Sb 2 O 3 shows excellent dielectric properties, and its relaxation mechanisms are elucidated.
Authors
- Yu Jing (ORCID: https://orcid.org/0000-0003-1764-6353)
- Kailang Liu (ORCID: https://orcid.org/0009-0005-3374-0720)
- Atta Ur Rehman (ORCID: https://orcid.org/0000-0001-8324-7305)
- Jiuren Zhou (ORCID: https://orcid.org/0000-0002-0915-5354)
- Genquan Han (ORCID: https://orcid.org/0000-0001-5140-4150)
- Chunjuan Tang (ORCID: https://orcid.org/0000-0002-9521-4997)
- Francis Chi-Chung Ling (ORCID: https://orcid.org/0000-0003-4757-1065)
- Jingwen Shi (ORCID: https://orcid.org/0000-0002-4802-0727)
- Wen‐Di Li (ORCID: https://orcid.org/0000-0002-7005-2784)
- Ruey Jinq Ong (ORCID: https://orcid.org/0009-0006-6727-5123)
- Hao Wang (ORCID: https://orcid.org/0000-0003-4563-1132)
- Wei Han (ORCID: https://orcid.org/0000-0003-0759-1766)
Institutions
- Xidian University (CN)
- University of Toronto (CA)
- South China Normal University (CN)
- Institute of Microelectronics (CN)
- Huazhong University of Science and Technology (CN)
- Hubei University (CN)
- University of Hong Kong (HK)
Publication Details
- Journal
- Journal of Materials Chemistry C
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d5tc02358k
- Primary Topic
- Catalysis and Oxidation Reactions
- Type
- article
- Field-Weighted Citation Impact
- 0.00