CALIBRATION FEATURES OF THE ATOMIC FORCE MICROSCOPE SCANNING DEVICE
This paper discusses the specifics of the calibration process of an atomic force microscope scanning device. The basic information about the atomic force microscope, its principle of operation, as well as information about the scanning device is given. The specifics of the scanner calibration are considered. The topographic images of the calibration grids were compared before and after calibration. An assessment of the change in error introduced by the scanner in each projection was carried out.
Authors
- N. V. Vishnyakov (ORCID: https://orcid.org/0000-0002-1270-3446)
- V.V. Kuklev
Publication Details
- Published
- 2025-06-15
- DOI
- https://doi.org/10.21667/978-5-7722-0424-5-108-111
- Primary Topic
- Advanced Materials Characterization Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00