Fifty Years Ago, the Dill Papers

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Publication Details

Journal
Journal of Micro/Nanopatterning Materials and Metrology
Published
2025-08-28
DOI
https://doi.org/10.1117/1.jmm.24.3.030101
Primary Topic
Advancements in Photolithography Techniques
Type
article
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article

Fifty Years Ago, the Dill Papers

Chris A. Mack
Journal of Micro/Nanopatterning Materials and Metrology
Advancements in Photolithography Techniques
article

Fifty Years Ago, the Dill Papers

Chris A. Mack
article en

Abstract

No abstract available for this paper.
Journal of Micro/Nanopatterning Materials and MetrologyVol. 24(03)
Openalex Percentile: Top 78%
Advancements in Photolithography Techniques
DOIOpen Access PDFOpenAlex
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Fifty Years Ago, the Dill Papers — Chris A. Mack · Journal of Micro/Nanopatterning Materials and Metrology (2025) | TGRS Research Map | TGRS