Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth
β-Ga2O3 and its solid solutions –@-(AlxGa1-x)2O3 are considered as potential candidate materials for next generation power devices due to their ultra-wide bandgaps (4.85.5.6 eV) and large breakdown electric field (.8 MVcm-1). Wafers prepared from bulk crystals constitute a foundation in a device fabrication chain. The present report briefly discusses thermodynamics, challenges in growing bulk crystals from the melt by different methods, which enable at least 2-inch diameter wafers, crystal structural quality, electrical properties, and factors affecting crystal growth costs.
Authors
- Zbigniew Galazka (ORCID: https://orcid.org/0000-0003-0812-2873)
Institutions
- Leibniz Institute for Crystal Growth (DE)
- Leibniz Institute for Crystal Growth (DE)
Publication Details
- Journal
- IEEE Transactions on Semiconductor Manufacturing
- Published
- 2025-08-28
- DOI
- https://doi.org/10.1109/tsm.2025.3603605
- Citations
- 2
- Primary Topic
- Ga2O3 and related materials
- Type
- article
- Field-Weighted Citation Impact
- 0.85
Funders
- Deutsche Forschungsgemeinschaft
- Bundesministerium für Bildung und Forschung
- Leibniz-Gemeinschaft