Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth

β-Ga2O3 and its solid solutions –@-(AlxGa1-x)2O3 are considered as potential candidate materials for next generation power devices due to their ultra-wide bandgaps (4.85.5.6 eV) and large breakdown electric field (.8 MVcm-1). Wafers prepared from bulk crystals constitute a foundation in a device fabrication chain. The present report briefly discusses thermodynamics, challenges in growing bulk crystals from the melt by different methods, which enable at least 2-inch diameter wafers, crystal structural quality, electrical properties, and factors affecting crystal growth costs.

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Publication Details

Journal
IEEE Transactions on Semiconductor Manufacturing
Published
2025-08-28
DOI
https://doi.org/10.1109/tsm.2025.3603605
Citations
2
Primary Topic
Ga2O3 and related materials
Type
article
Field-Weighted Citation Impact
0.85

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article

Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth

Zbigniew Galazka
2 citations
IEEE Transactions on Semiconductor Manufacturing
Ga2O3 and related materials
0.85
article

Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth

Zbigniew Galazka
article en
2 citations

Abstract

β-Ga2O3 and its solid solutions –@-(AlxGa1-x)2O3 are considered as potential candidate materials for next generation power devices due to their ultra-wide bandgaps (4.85.5.6 eV) and large breakdown electric field (.8 MVcm-1). Wafers prepared from bulk crystals constitute a foundation in a device fabrication chain. The present report briefly discusses thermodynamics, challenges in growing bulk crystals from the melt by different methods, which enable at least 2-inch diameter wafers, crystal structural quality, electrical properties, and factors affecting crystal growth costs.

IEEE Transactions on Semiconductor ManufacturingVol. 38(4)
Leibniz Institute for Crystal Growth (DE), Leibniz Institute for Crystal Growth (DE)
Deutsche Forschungsgemeinschaft, Bundesministerium für Bildung und Forschung, Leibniz-Gemeinschaft
Openalex Percentile: Top 26%
Ga2O3 and related materials
0.85
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