Mechanical, Tribological, and Corrosion Behavior of Magnetron-Sputtered VN Coatings Deposited at Different Substrate Temperatures

Vanadium nitride (VN) ceramic layers were deposited on 304L stainless steel specimens by direct current (DC) magnetron sputtering in an Ar/N2 gas mixture at substrate temperatures of 250 °C, 300 °C, and 350 °C. The obtained films were evaluated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM). The results showed the existence of VN and V2N phases in the as-deposited coatings. It was found that the surface roughness parameter (Ra = 10 nm) decreased with increasing substrate temperatures up to 350 °C. The highest hardness (10.6 GPa) was achieved in the layer produced at 300 °C. The low values of plastic and elastic deformation, as well as a low friction coefficient (0.38), led to an enhancement in the coatings’ tribological properties. The film’s thickness increased with increasing temperature due to the presence of nucleation centers in the films. The highest thickness (557 nm) was achieved in the layer deposited at 350 °C. The electrochemical tests exhibited reliable protection against corrosion in strongly aggressive electrolytes. It has been proven that the temperature significantly affects the ceramic coatings’ structural, morphological, tribological, and corrosion properties.