Predictive Maintenance Using Machine Learning in Semiconductor Manufacturing

Semiconductor manufacturing process is highly intricate and capital-intensive, requiring equipment reliability and maximized uptime to achieve high yields and efficient production. Traditional maintenance strategies, such as reactive and scheduled maintenance, often fail to prevent unexpected equipment failures, leading to costly disruptions. This paper explores the application of machine learning techniques in developing predictive maintenance (PdM) models tailored to the semiconductor manufacturing environment. By analyzing large volumes of operational data, including sensor readings and historical maintenance records, machine learning algorithms can effectively predict potential equipment failures, allowing for timely and proactive maintenance interventions. This study reviews current methodologies, discusses the unique challenges faced in this industry, and proposes advanced machine learning models to enhance predictive accuracy. The implementation of predictive maintenance solutions is shown to significantly reduce unplanned downtime, optimize maintenance schedules, and improve overall operational efficiency. The findings demonstrate the potential of machine learning-driven predictive maintenance to transform semiconductor manufacturing processes, offering substantial benefits in terms of cost savings and production reliability.

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Publication Details

Published
2025-06-20
DOI
https://doi.org/10.1109/isie62713.2025.11124685
Primary Topic
Industrial Vision Systems and Defect Detection
Type
article
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article

Predictive Maintenance Using Machine Learning in Semiconductor Manufacturing

Ravindra B. Patil, Ram Chandra Palsaniya, Rajkumar Thanu
Industrial Vision Systems and Defect Detection
article

Predictive Maintenance Using Machine Learning in Semiconductor Manufacturing

Ravindra B. Patil, Ram Chandra Palsaniya, Rajkumar Thanu
article en

Abstract

Semiconductor manufacturing process is highly intricate and capital-intensive, requiring equipment reliability and maximized uptime to achieve high yields and efficient production. Traditional maintenance strategies, such as reactive and scheduled maintenance, often fail to prevent unexpected equipment failures, leading to costly disruptions. This paper explores the application of machine learning techniques in developing predictive maintenance (PdM) models tailored to the semiconductor manufacturing environment. By analyzing large volumes of operational data, including sensor readings and historical maintenance records, machine learning algorithms can effectively predict potential equipment failures, allowing for timely and proactive maintenance interventions. This study reviews current methodologies, discusses the unique challenges faced in this industry, and proposes advanced machine learning models to enhance predictive accuracy. The implementation of predictive maintenance solutions is shown to significantly reduce unplanned downtime, optimize maintenance schedules, and improve overall operational efficiency. The findings demonstrate the potential of machine learning-driven predictive maintenance to transform semiconductor manufacturing processes, offering substantial benefits in terms of cost savings and production reliability.

Santa Clara University (US), IEEE Computer Society (US), Robotics Research (United States) (US)
Openalex Percentile: Top 69%
Industrial Vision Systems and Defect Detection
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Predictive Maintenance Using Machine Learning in Semiconductor Manufacturing — Ravindra B. Patil, Ram Chandra Palsaniya, et al. · (2025) | TGRS Research Map | TGRS