Adaptive Robust Tracking Control for Precision Motion Stages via Fully Actuated System Approach

In this article, the tracking control problem of linear-motor-driven motion stages is solved via the high-order fully actuated (HOFA) system approach, which has the advantage of conciseness and sufficient freedom of parametric design. Using the established HOFA model of the motion system, an adaptive robust tracking controller is designed to deal with parameter uncertainty, unmodeled dynamics, and disturbance. To overcome the blindness of parameter tuning, a detailed parametric design method is proposed. Comparative experiments have been designed and implemented on a linear-motor-driven precision motion stage. The result shows that the controller designed using the proposed method can achieve good tracking performance under different conditions.