Multi-Channel LE-HEMT With Highest Luminance in Record Toward Micro-Display and On-Chip High-Detectivity Photodetectors

In this study, AlGaN/GaN light-emitting HEMT (LE-HEMT) with varying numbers of InGaN layers as both multi-channels (MCs) and multiple-quantum-wells (MQWs) are fabricated, with highest luminance in record being achieved on GaN HEMT epitaxial wafers. The proposed structure achieves true epitaxially monolithic integration by directly incorporating MQWs with the two-dimensional electron gas channels. It is demonstrated that an outstanding switching ratio of <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub>/<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</sub> = 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">8</sup> is achieved, despite the incorporation of MCs. A luminance of up to 2.1 × 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> cd/m<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and an outstanding light output power of 13 W/cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> are obtained, achieving the highest reported luminance for LE-HEMTs. Additionally, the LE-HEMT can also be utilized as an on-chip photodetector, with ultra-low dark current of fA level. Under 365 nm UV irradiation, the LE-HEMT exhibits extremely high ratio of photocurrent to dark current (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">light</sub>/<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">dark</sub>) of about 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">7</sup> and an outstanding specific detectivity of 5.2 × 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">14</sup> Jones at <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DD</sub> = - 5 V under light power density of 1 mW/cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup>. This work provides a novel approach for the monolithic integration of display pixel, its driver device, and also on-chip photodetectors, paving the way for potential applications in both high-refresh-rate Micro-LED displays and full-duplex visible light communications.