Optimal 3D chemical imaging with multimodal electron tomography

Abstract Accurate mapping of nanoscale chemistry in three dimensions (3D) has been a longstanding challenge. Modern electron microscopy provides chemical images by electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectrometry (EDX) but requires high fluences that damage specimens. In 3D, the requirements are worse; electron tomography demands many high-fluence chemical maps for reconstruction, creating a tradeoff between resolution, accuracy, and sample survival. Fused multimodal electron tomography (MM-ET) alleviates this requirement by leveraging lower-fluence high-angle annular dark-field (HAADF) images alongside a few chemical maps to dramatically improve chemical resolution. Here, experimental and computational parameter space is systematically explored to determine when MM-ET performs best. Ideal imaging conditions balance sample survival with resolution and chemical specificity; we recommend a tilt range of at least ± 70 ∘ , acquiring 40 equally spaced HAADF projections (signal-to-noise > 10), and 7 EELS/EDX maps of each chemistry (signal-to-noise > 4).