A study of the interaction between the number of aluminum film layers and temperature on the plasticity of raster scratching into grooves

To investigate the influence of varying aluminum film layers and temperatures on the elastic-plastic deformation process during mechanical scratching of aluminum films, we analysed the microstructure and mechanical properties of different aluminum films. Finite element simulations were employed to study the stress distribution and the laws of elastic-plastic deformation across various models at different temperatures. Additionally, we compared the groove shapes of aluminum films with differing layer counts after scratching. The results reveal that the layered interface near the bottom of the groove accumulates significant compressive stress, which reduces the extent of film rebound. Furthermore, an increase in temperature facilitates the release of stress in the aluminum film, promoting plastic deformation. As both the number of aluminum film layers and temperature increase, the plastic deformation of the aluminum film progressively intensifies, thereby allowing for precise control over the groove shape.