Research on simulation model of two-wavelength digital holography for measuring microstructures based on Zemax

We propose a simulation model of a dual-wavelength digital holographic measurement microstructure system based on ZEMAX software. The model can simulate the actual optical path so that researchers can simulate the designed optical path before building it, deeply understand the designed optical path, and verify the feasibility of the optical path. Firstly, the optical device is modeled, and the optical path simulation model is established in Zemax non-sequential mode. At the same time, the algorithm adapted to the simulation model is established by using MATLAB software. Then, the measured samples are modeled, and the optical path simulation model and algorithm are tested. The validity and accuracy of the simulation model of the dual-wavelength digital holographic measurement microstructure system are verified. The simulation model provides a new analysis method for the study of microstructure-related problems in digital holographic measurement and has guiding significance for optical design, selection of optical components, and verification of post-processing algorithms.