Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits

Silicon photonics (SiP) has emerged as a leading platform in integrated photonics enabling a variety of applications including high-speed communications, quantum photonics, gyroscopes, and light detection and ranging (LIDAR)[1]. SiP is well suited for operation in the O, S, and C telecommunications bands. However, silicon has fundamental material limitations that restrict its uses in visible (VIS) and near-infrared (NIR) applications, such as microscopy, augmented reality, and biological sensing [2]. As an alternative to silicon-on-insulator (SOI), silicon nitride (SiN)-based platforms have gained success in recent years and are now being offered by foundries through multi-project wafer (MPW) fabrication runs [2], [3].

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Published
2025-06-23
DOI
https://doi.org/10.1109/cleo/europe-eqec65582.2025.11111230
Primary Topic
Photonic and Optical Devices
Type
article
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article

Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits

Stefanie Markevich, Pavel Cheben, Andrew P. Knights, Jonathan D. B. Bradley et al.
Photonic and Optical Devices
article

Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits

Stefanie Markevich, Pavel Cheben, Andrew P. Knights, Jonathan D. B. Bradley, Kevin Setzer, Alexandria McKinlay, P. Ravi Selvaganapathy, Pooya Torab Ahmadi, Niloofar Majidian Taleghani, Khadijeh Miarabbas Kiani, Cameron M. Naraine, Jocelyn Bachman, Hamidu M. Mbonde, Batoul Hashemi, Bruno L. Segat Frare, Jens H. Schmid, Peter Mascher, Mirwais Aktary, Renjie Wang, Cameron Horvath
article en

Abstract

Silicon photonics (SiP) has emerged as a leading platform in integrated photonics enabling a variety of applications including high-speed communications, quantum photonics, gyroscopes, and light detection and ranging (LIDAR)[1]. SiP is well suited for operation in the O, S, and C telecommunications bands. However, silicon has fundamental material limitations that restrict its uses in visible (VIS) and near-infrared (NIR) applications, such as microscopy, augmented reality, and biological sensing [2]. As an alternative to silicon-on-insulator (SOI), silicon nitride (SiN)-based platforms have gained success in recent years and are now being offered by foundries through multi-project wafer (MPW) fabrication runs [2], [3].

Applied Nanotools (Canada) (CA), National Research Council Canada (CA), McMaster University (CA)
Affordable and clean energy
Openalex Percentile: Top 79%
Photonic and Optical Devices
DOISourceOpenAlex
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Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits — Stefanie Markevich, Pavel Cheben, et al. · (2025) | TGRS Research Map | TGRS