High Repetition Rate, High Average Power XUV Sources Based on High Harmonic Generation

High harmonic generation (HHG) sources [1] provide fully coherent laser-like radiation in the Extreme-Ultraviolett (EUV/XUV) and soft-Xray spectral range with femto- or attosecond pulse duration. These sources are ideal metrology tools in scientific or industrial applications: The short wavelength allows very high spatial resolution in scattering or imaging of nanostructures created by state-of-the-art microchip EUV lithography. Their spectral bandwidth and ultrashort pulse durations are very useful in ultrafast spectroscopy to investigate the fast reactions occurring in solar cells, catalysis or to observe directly the carrier dynamics in superconductors or next generation semiconductors. For all these applications, HHG sources with high repetition rates and high average powers are required to minimize the acquisition times, leading to a fast turnaround in sample characterization. At the same time, a high robustness and stability of the source is needed for low -maintenance operation with minimal down times. Based on robust high-power femtosecond Ytterbium (Yb) laser systems together with the multipass cell pulse post compression technology [2], Class 5 Photonics is developing the Moonlander high harmonic generation source to fulfill these requirements.